Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
Citation
Advanced Materials Interfaces, volume 4, issue 18, page 1700274Publisher
WileyType
articleDescription
From Crossref via Jisc Publications Router.Version: VoR
Funder: Science Foundation Ireland, Grant no: 11/PI/1117, FundRef: 10.13039/501100001602
Funder: Irish Research Council for Science, Engineering and Technology, FundRef: 10.13039/501100001596
Funder: Science Foundation Ireland Strategic Research Cluster Grant entitled
Funder: Functional Oxides and Related Materials for Electronics, Grant no: 07/SRC/I1172
