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    Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD

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    Authors
    Hagen, Dirk J.
    Connolly, James
    Povey, Ian M.
    Rushworth, Simon
    Pemble, Martyn E.
    Publication Date
    2017-05-31
    
    Metadata
    Show full item record
    Citation
    Advanced Materials Interfaces, volume 4, issue 18, page 1700274
    Publisher
    Wiley
    URI
    http://hdl.handle.net/10034/621318
    Type
    article
    Description
    From Crossref via Jisc Publications Router.
    Version: VoR
    Funder: Science Foundation Ireland, Grant no: 11/PI/1117, FundRef: 10.13039/501100001602
    Funder: Irish Research Council for Science, Engineering and Technology, FundRef: 10.13039/501100001596
    Funder: Science Foundation Ireland Strategic Research Cluster Grant entitled
    Funder: Functional Oxides and Related Materials for Electronics, Grant no: 07/SRC/I1172
    Collections
    Computer Science

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