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dc.contributor.authorArroyo, Emmanuelle*
dc.contributor.authorJia, Yu*
dc.contributor.authorDu, Sijun*
dc.contributor.authorChen, Shao-Tuan*
dc.contributor.authorSeshia, Ashwin A.*
dc.date.accessioned2017-09-25T12:24:36Z
dc.date.available2017-09-25T12:24:36Z
dc.date.issued2017-08-01
dc.identifier.citationArroyo, E., Jia, Y., Du, S., Chen, S.T, & Seshia, A.A. (2017). Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature, Journal of Microelectromechanical Systemsen
dc.identifier.doi10.1109/JMEMS.2017.2723626
dc.identifier.urihttp://hdl.handle.net/10034/620624
dc.description“© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.”en
dc.description.abstractThis paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.
dc.language.isoenen
dc.publisherIEEEen
dc.relation.urlhttp://ieeexplore.ieee.org/document/7999189/en
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/en
dc.subjectEnergy harvestingen
dc.subjecthigh temperatureen
dc.subjectMEMSen
dc.subjectAlNen
dc.subjectCantileveren
dc.titleExperimental and theoretical study of a piezoelectric vibration energy harvester under high temperatureen
dc.typeArticleen
dc.contributor.departmentUniversity of Cambridge; University of Chesteren
dc.identifier.journalJournal of Microelectromechanical Systems
dc.date.accepted2017-08-01
or.grant.openaccessYesen
rioxxterms.funderInnovate UKen
rioxxterms.identifier.project102152en
rioxxterms.versionAMen
rioxxterms.licenseref.startdate2017-08-01
refterms.dateFCD2019-07-15T09:55:35Z
refterms.versionFCDAM
refterms.dateFOA2018-08-13T16:17:07Z
html.description.abstractThis paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.


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