Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature

Arroyo, Emmanuelle; Jia, Yu; Du, Sijun; Chen, Shao-Tuan; Seshia, Ashwin A.

dc.contributor.author	Arroyo, Emmanuelle	*
dc.contributor.author	Jia, Yu	*
dc.contributor.author	Du, Sijun	*
dc.contributor.author	Chen, Shao-Tuan	*
dc.contributor.author	Seshia, Ashwin A.	*
dc.date.accessioned	2017-09-25T12:24:36Z
dc.date.available	2017-09-25T12:24:36Z
dc.date.issued	2017-08-01
dc.identifier.citation	Arroyo, E., Jia, Y., Du, S., Chen, S.T, & Seshia, A.A. (2017). Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature, Journal of Microelectromechanical Systems	en
dc.identifier.doi	10.1109/JMEMS.2017.2723626
dc.identifier.uri	http://hdl.handle.net/10034/620624
dc.description	“© 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.”	en
dc.description.abstract	This paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.
dc.language.iso	en	en
dc.publisher	IEEE	en
dc.relation.url	http://ieeexplore.ieee.org/document/7999189/	en
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/4.0/	en
dc.subject	Energy harvesting	en
dc.subject	high temperature	en
dc.subject	MEMS	en
dc.subject	AlN	en
dc.subject	Cantilever	en
dc.title	Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature	en
dc.type	Article	en
dc.contributor.department	University of Cambridge; University of Chester	en
dc.identifier.journal	Journal of Microelectromechanical Systems
dc.date.accepted	2017-08-01
or.grant.openaccess	Yes	en
rioxxterms.funder	Innovate UK	en
rioxxterms.identifier.project	102152	en
rioxxterms.version	AM	en
rioxxterms.licenseref.startdate	2017-08-01
html.description.abstract	This paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.