Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature
AffiliationUniversity of Cambridge; University of Chester
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AbstractThis paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.
CitationArroyo, E., Jia, Y., Du, S., Chen, S.T, & Seshia, A.A. (2017). Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature, Journal of Microelectromechanical Systems
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