Micromachined cantilevers-on-membrane topology for broadband vibration energy harvesting
AffiliationUniversity of Cambridge; University of Chester
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AbstractThe overwhelming majority of microelectromechanical piezoelectric vibration energy harvesting topologies have been based on cantilevers, doubly-clamped beams or basic membranes. While these conventional designs offer simplicity, their broadband responses have been limited thus far. This paper investigates the feasibility of a new integrated cantilevers-on-membrane design that explores the optimisation of piezoelectric strain distribution and improvement of the broadband power output. While a classic membrane has the potential to offer a broader resonant peak than its cantilever counterpart, the inclusion of a centred proof mass compromises its otherwise high strain energy regions. The proposed topology addresses this issue by relocating the proof mass onto subsidiary cantilevers and combines the merits of both the membrane and the cantilever designs. Numerical simulations, constructed using fitted values based on finite element models, were used to investigate the broadband response of the proposed design in contrast to a classic plain membrane. Experimentally, when subjected to a band-limited white noise excitation, the new cantilevers-on-membrane harvester exhibited nearly two fold power output enhancement when compared to a classic plain membrane harvester of a comparable size.
CitationJia, Y., Du, S., & Seshia, A. A. (2016). Micromachined cantilevers-on-membrane topology for broadband vibration energy harvesting. Journal of Micromechanics and Microengineering, 26(12). DOI: 10.1088/0960-1317/26/12/124007
DescriptionThis is an author-created, un-copyedited version of an article accepted for publication in Journal of Micromechanics and Microengineering. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://iopscience.iop.org/article/10.1088/0960-1317/26/12/124007.
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