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    SubjectsEnergy harvesting (3)
    MEMS (3)
    AlN (1)Cantilever (1)high temperature (1)Piezoelectric transducers (1)reliability (1)Soft damping (1)View MoreJournalJournal of Microelectromechanical Systems (1)Journal of Micromechanics and Microengineering (1)Sensors and Actuators A: Physical (1)Authors
    Arroyo, Emmanuelle (3)
    Chen, Shao-Tuan (3)Du, Sijun (3)
    Jia, Yu (3)
    Seshia, Ashwin A. (3)Sun, Boqian (1)Zhao, Chun (1)TypesArticle (3)

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    A New Electrode Design Method in Piezoelectric Vibration Energy Harvesters to Maximize Output Power

    Du, Sijun; Jia, Yu; Chen, Shao-Tuan; Zhao, Chun; Sun, Boqian; Arroyo, Emmanuelle; Seshia, Ashwin A. (Elsevier, 2017-07-19)
    A resonant vibration energy harvester typically comprises of a clamped anchor and a vibrating shuttle with a proof mass. Piezoelectric materials are embedded in locations of high strain in order to transduce mechanical deformation into electrical charge. Conventional design for piezoelectric vibration energy harvesters (PVEH) usually utilizes piezoelectric materials and metal electrode layers covering the entire surface area of the cantilever with no consideration provided to examine the trade-off involved with respect to maximize output power. This paper reports on the theory and experimental verification underpinning optimization of the active electrode area in order to maximize output power. The calculations show that, in order to maximize the output power of a PVEH, the electrode should cover the piezoelectric layer from the peak strain area to a position, where the strain is a half of the average strain in all the previously covered area. With the proposed electrode design, the output power can be improved by 145% and 126% for a cantilever and a clamped-clamped beam, respectively. MEMS piezoelectric harvesters are fabricated to experimentally validate the theory.
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    Experimental and theoretical study of a piezoelectric vibration energy harvester under high temperature

    Arroyo, Emmanuelle; Jia, Yu; Du, Sijun; Chen, Shao-Tuan; Seshia, Ashwin A. (IEEE, 2017-08-01)
    This paper focuses on studying the effect of increasing the ambient temperature up to 160 °C on the power harvested by an MEMS piezoelectric micro-cantilever manufactured using an aluminum nitride-on-silicon fabrication process. An experimental study shows that the peak output power decreases by 60% to 70% depending on the input acceleration. A theoretical study establishes the relationship of all important parameters with temperature and includes them into a temperature-dependent model. This model shows that around 50% of the power drop can be explained by a decreasing quality factor, and that thermal stresses account for around 30% of this decrease.
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    Shock Reliability Enhancement for MEMS Vibration Energy Harvesters with Nonlinear Air Damping as Soft Stopper

    Chen, Shao-Tuan; Du, Sijun; Arroyo, Emmanuelle; Jia, Yu; Seshia, Ashwin A. (IOP Publishing, 2017-09-20)
    This paper presents a novel application of utilising nonlinear air damping as soft mechanical stopper to increase the shock reliability for MEMS vibration energy harvesters. Theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness is presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.
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