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Shock Reliability Enhancement for MEMS Vibration Energy Harvesters with Nonlinear Air Damping as Soft Stopper
Chen, Shao-Tuan Du, Sijun Arroyo, Emmanuelle Jia, Yu Seshia, Ashwin A.
Chen, Shao-Tuan
Du, Sijun
Arroyo, Emmanuelle
Jia, Yu
Seshia, Ashwin A.
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2017-09-20
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Abstract
This paper presents a novel application of utilising nonlinear air damping as soft mechanical stopper to increase the shock reliability for MEMS vibration energy harvesters. Theoretical framework for nonlinear air damping is constructed for MEMS vibration energy harvesters operating in different air pressure levels, and characterisation experiments are conducted to establish the relationship between air pressure and nonlinear air damping coefficient for rectangular cantilever MEMS micro cantilevers with different proof masses. Design guidelines on choosing the optimal air pressure level for different MEMS vibration energy harvesters based on the trade-off between harvestable energy and the device robustness is presented, and random excitation experiments are performed to verify the robustness of MEMS vibration energy harvesters with nonlinear air damping as soft stoppers to limit the maximum deflection distance and increase the shock reliability of the device.
Citation
Chen, S. T., Du, S., Arroyo, E., Jia, Y., & Seshia, A. A. (2017). Shock Reliability Enhancement for MEMS Vibration Energy Harvesters with Nonlinear Air Damping as Soft Stopper. Journal of Micromechanics and Microengineering, 27, 104003. http://doi.org/10.1088/1361-6439/aa82ed
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IOP Publishing
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Journal of Micromechanics and Microengineering
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Article
Language
en
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This is an author-created, un-copyedited version of an article accepted for publication in Journal of Micromechanics and Microengineering. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://dx.doi.org/10.1088/1361-6439/aa82ed
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0960-1317
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1361-6439