Micromachined Thick Mesh Filters for Millimeter-Wave and Terahertz Applications

Hdl Handle:
http://hdl.handle.net/10034/606945
Title:
Micromachined Thick Mesh Filters for Millimeter-Wave and Terahertz Applications
Authors:
Wang, Yi; Yang, Bin; Tian, Yingtao; Donnan, Robert S.; Lancaster, Michael J.
Abstract:
This paper presents several freestanding bandpass mesh filters fabricated using an SU-8 based micromachining technique. The important geometric feature of the filters, which SU8 is able to increase, is the thickness of the cross-shaped micromachined slots. This is 5 times its width. This thickness offers an extra degree of control over the resonance characteristics. The large thickness not only strengthens the structures, but also enhances the resonance quality factor (Q-factor). A 0.3 mm thick, single layer, mesh filter resonant at 300 GHz has been designed, fabricated and its performance verified. The measured Q-factor is 16.3 and the insertion loss is 0.98 dB. Two multi-layer filter structures have also been demonstrated. The first one is a stacked structure of two single mesh filters producing a double thickness, which achieved a further increased Q-factor of 27. This is over six times higher than a thin mesh filter. The second multi-layer filter is an electromagnetically coupled structure forming a two-pole filter. The coupling characteristics are discussed based on experimental and simulation results. These thick mesh filters can potentially be used for sensing and material characterization at millimeter-wave and terahertz frequencies.
Affiliation:
University of Bolton
Citation:
Wang, Y., Yang, B., Tian, Y., Donnan, R. S., & Lancaster, M. J. (2014). Micromachined thick mesh filters for millimeter-wave and terahertz applications. IEEE Transactions on Terahertz Science and Technology, 4(2), 247-253. http://dx.doi.org/10.1109/TTHZ.2013.2296564
Publisher:
IEEE
Journal:
IEEE Transactions on Terahertz Science and Technology
Publication Date:
1-Mar-2014
URI:
http://hdl.handle.net/10034/606945
DOI:
10.1109/TTHZ.2013.2296564
Type:
Article
Language:
en
Description:
© 20xx IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Appears in Collections:
Electronic and Electrical Engineering

Full metadata record

DC FieldValue Language
dc.contributor.authorWang, Yien
dc.contributor.authorYang, Binen
dc.contributor.authorTian, Yingtaoen
dc.contributor.authorDonnan, Robert S.en
dc.contributor.authorLancaster, Michael J.en
dc.date.accessioned2016-04-25T13:09:41Zen
dc.date.available2016-04-25T13:09:41Zen
dc.date.issued2014-03-01en
dc.identifier.citationWang, Y., Yang, B., Tian, Y., Donnan, R. S., & Lancaster, M. J. (2014). Micromachined thick mesh filters for millimeter-wave and terahertz applications. IEEE Transactions on Terahertz Science and Technology, 4(2), 247-253. http://dx.doi.org/10.1109/TTHZ.2013.2296564en
dc.identifier.doi10.1109/TTHZ.2013.2296564en
dc.identifier.urihttp://hdl.handle.net/10034/606945en
dc.description© 20xx IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en
dc.description.abstractThis paper presents several freestanding bandpass mesh filters fabricated using an SU-8 based micromachining technique. The important geometric feature of the filters, which SU8 is able to increase, is the thickness of the cross-shaped micromachined slots. This is 5 times its width. This thickness offers an extra degree of control over the resonance characteristics. The large thickness not only strengthens the structures, but also enhances the resonance quality factor (Q-factor). A 0.3 mm thick, single layer, mesh filter resonant at 300 GHz has been designed, fabricated and its performance verified. The measured Q-factor is 16.3 and the insertion loss is 0.98 dB. Two multi-layer filter structures have also been demonstrated. The first one is a stacked structure of two single mesh filters producing a double thickness, which achieved a further increased Q-factor of 27. This is over six times higher than a thin mesh filter. The second multi-layer filter is an electromagnetically coupled structure forming a two-pole filter. The coupling characteristics are discussed based on experimental and simulation results. These thick mesh filters can potentially be used for sensing and material characterization at millimeter-wave and terahertz frequencies.en
dc.language.isoenen
dc.publisherIEEEen
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/en
dc.subjectFrequency selective surfaces, micromachining, millimeter-wave devices, filtersen
dc.titleMicromachined Thick Mesh Filters for Millimeter-Wave and Terahertz Applicationsen
dc.typeArticleen
dc.contributor.departmentUniversity of Boltonen
dc.identifier.journalIEEE Transactions on Terahertz Science and Technologyen
dc.date.accepted2014-01-09en
or.grant.openaccessYesen
rioxxterms.funderunfundeden
rioxxterms.identifier.projectunfundeden
rioxxterms.versionAMen
rioxxterms.licenseref.startdate2016-04-25en
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